The effect of interlayer composition and thickness on the stabilization of cubic AlN in AlN/Ti-Al-N superlattices

Publikationen: Beitrag in FachzeitschriftArtikelForschung(peer-reviewed)

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The effect of interlayer composition and thickness on the stabilization of cubic AlN in AlN/Ti-Al-N superlattices. / Chawla, Vipin; Holec, David; Mayrhofer, Paul.
in: Thin solid films, Jahrgang 565, 2014, S. 94-100.

Publikationen: Beitrag in FachzeitschriftArtikelForschung(peer-reviewed)

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@article{c1fad23e6e9b42aeb10e5f9082bde220,
title = "The effect of interlayer composition and thickness on the stabilization of cubic AlN in AlN/Ti-Al-N superlattices",
author = "Vipin Chawla and David Holec and Paul Mayrhofer",
year = "2014",
doi = "10.1016/j.tsf.2014.06.051",
language = "English",
volume = "565",
pages = "94--100",
journal = "Thin solid films",
issn = "0040-6090",
publisher = "Elsevier",

}

RIS (suitable for import to EndNote) - Download

TY - JOUR

T1 - The effect of interlayer composition and thickness on the stabilization of cubic AlN in AlN/Ti-Al-N superlattices

AU - Chawla, Vipin

AU - Holec, David

AU - Mayrhofer, Paul

PY - 2014

Y1 - 2014

U2 - 10.1016/j.tsf.2014.06.051

DO - 10.1016/j.tsf.2014.06.051

M3 - Article

VL - 565

SP - 94

EP - 100

JO - Thin solid films

JF - Thin solid films

SN - 0040-6090

ER -