Structural and mechanical evolution of reactively and non-reactively sputterd Zr-Al-N thin films during annealing

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Structural and mechanical evolution of reactively and non-reactively sputterd Zr-Al-N thin films during annealing. / Mayrhofer, P.H.; Sonnleitner, Doris; Bartosik, M. et al.
in: Surface & coatings technology, Jahrgang 244, 2014, S. 52-56.

Publikationen: Beitrag in FachzeitschriftArtikelForschung(peer-reviewed)

Bibtex - Download

@article{e2fbd77fecc34b8e892fefff6d279dc0,
title = "Structural and mechanical evolution of reactively and non-reactively sputterd Zr-Al-N thin films during annealing",
author = "P.H. Mayrhofer and Doris Sonnleitner and M. Bartosik and David Holec",
year = "2014",
doi = "10.1016/j.surfcoat.2014.01.049",
language = "English",
volume = "244",
pages = "52--56",
journal = "Surface & coatings technology",
issn = "0257-8972",
publisher = "Elsevier",

}

RIS (suitable for import to EndNote) - Download

TY - JOUR

T1 - Structural and mechanical evolution of reactively and non-reactively sputterd Zr-Al-N thin films during annealing

AU - Mayrhofer, P.H.

AU - Sonnleitner, Doris

AU - Bartosik, M.

AU - Holec, David

PY - 2014

Y1 - 2014

U2 - 10.1016/j.surfcoat.2014.01.049

DO - 10.1016/j.surfcoat.2014.01.049

M3 - Article

VL - 244

SP - 52

EP - 56

JO - Surface & coatings technology

JF - Surface & coatings technology

SN - 0257-8972

ER -