Sputter deposited silver niobate thin films: Pathway towards phase purity
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in: Thin solid films, Jahrgang 804.2024, Nr. 15 September, 140505, 15.09.2024.
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
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TY - JOUR
T1 - Sputter deposited silver niobate thin films: Pathway towards phase purity
AU - Kölbl, Lukas
AU - Kobald, Alexander
AU - Griesser, Thomas
AU - Munnik, Frans
AU - Mitterer, Christian
N1 - Publisher Copyright: © 2024 The Author(s)
PY - 2024/9/15
Y1 - 2024/9/15
N2 - The quest for environmentally sustainable alternatives to lead-based dielectric materials in dielectric capacitors has led research to the exploration of options such as silver niobate (AgNbO 3), which has been found to display excellent energy storage properties. Homogeneity and phase-purity of the used thin films are vital for optimal performance of these devices. In this study, a systematic variation of oxygen partial pressure and bias voltage during reactive d.c. magnetron co-sputtering from metallic targets is employed to synthesise AgNbO 3 thin films. Structural and chemical composition of the films are investigated using X-ray diffraction, Raman spectroscopy, X-ray photoelectron spectroscopy, energy dispersive X-ray spectroscopy, elastic recoil detection analysis, and Rutherford backscattering spectrometry. The findings emphasise the necessity of precise parameter control during deposition to avoid the presence of undesirable secondary phases like Ag and Ag 2Nb 4O 11 and to ensure the formation of homogeneous and phase-pure AgNbO 3 thin films. The gained insights demonstrate the potential of reactive d.c. magnetron sputtering for the deposition of lead-free AgNbO 3 thin films, offering pathways for enhanced environmental compatibility of future dielectric capacitors.
AB - The quest for environmentally sustainable alternatives to lead-based dielectric materials in dielectric capacitors has led research to the exploration of options such as silver niobate (AgNbO 3), which has been found to display excellent energy storage properties. Homogeneity and phase-purity of the used thin films are vital for optimal performance of these devices. In this study, a systematic variation of oxygen partial pressure and bias voltage during reactive d.c. magnetron co-sputtering from metallic targets is employed to synthesise AgNbO 3 thin films. Structural and chemical composition of the films are investigated using X-ray diffraction, Raman spectroscopy, X-ray photoelectron spectroscopy, energy dispersive X-ray spectroscopy, elastic recoil detection analysis, and Rutherford backscattering spectrometry. The findings emphasise the necessity of precise parameter control during deposition to avoid the presence of undesirable secondary phases like Ag and Ag 2Nb 4O 11 and to ensure the formation of homogeneous and phase-pure AgNbO 3 thin films. The gained insights demonstrate the potential of reactive d.c. magnetron sputtering for the deposition of lead-free AgNbO 3 thin films, offering pathways for enhanced environmental compatibility of future dielectric capacitors.
KW - Energy storage
KW - Magnetron sputtering
KW - Silver niobate
KW - Thin film
UR - http://www.scopus.com/inward/record.url?scp=85201857063&partnerID=8YFLogxK
U2 - 10.1016/j.tsf.2024.140505
DO - 10.1016/j.tsf.2024.140505
M3 - Article
VL - 804.2024
JO - Thin solid films
JF - Thin solid films
SN - 0040-6090
IS - 15 September
M1 - 140505
ER -