Restrictions of stress measurements using the curvature method by thermally induced plastic deformation of silicon substrates
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Restrictions of stress measurements using the curvature method by thermally induced plastic deformation of silicon substrates. / Saringer, Christian; Tkadletz, Michael; Mitterer, Christian.
in: Surface & coatings technology, Jahrgang 274, 25.07.2015, S. 68-75.
in: Surface & coatings technology, Jahrgang 274, 25.07.2015, S. 68-75.
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
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Bibtex - Download
@article{6d11bc3bf25641f1a497ebb74af77165,
title = "Restrictions of stress measurements using the curvature method by thermally induced plastic deformation of silicon substrates",
keywords = "Eigenspannung, Biegebalkenmethode, Hartstoffschichten, Substratverformung",
author = "Christian Saringer and Michael Tkadletz and Christian Mitterer",
year = "2015",
month = jul,
day = "25",
language = "English",
volume = "274",
pages = "68--75",
journal = "Surface & coatings technology",
issn = "0257-8972",
publisher = "Elsevier",
}
RIS (suitable for import to EndNote) - Download
TY - JOUR
T1 - Restrictions of stress measurements using the curvature method by thermally induced plastic deformation of silicon substrates
AU - Saringer, Christian
AU - Tkadletz, Michael
AU - Mitterer, Christian
PY - 2015/7/25
Y1 - 2015/7/25
KW - Eigenspannung
KW - Biegebalkenmethode
KW - Hartstoffschichten
KW - Substratverformung
UR - http://www.sciencedirect.com/science/article/pii/S0257897215003734
M3 - Article
VL - 274
SP - 68
EP - 75
JO - Surface & coatings technology
JF - Surface & coatings technology
SN - 0257-8972
ER -
