Mitigating Focused Ion Beam Damage in Molybdenum Nanopillars by In Situ Annealing
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
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in: Microscopy and microanalysis, Jahrgang 16, 2010, S. 1748-1749.
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
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TY - JOUR
T1 - Mitigating Focused Ion Beam Damage in Molybdenum Nanopillars by In Situ Annealing
AU - Lowry, Matt B.
AU - Kiener, Daniel
AU - Le Blanc, B. B.
AU - Chisholm, Claire
AU - Florando, Jeff N.
AU - Morris, J. W. Jr
AU - Minor, Andrew M.
PY - 2010
Y1 - 2010
U2 - 10.1017/S1431927610061957
DO - 10.1017/S1431927610061957
M3 - Article
VL - 16
SP - 1748
EP - 1749
JO - Microscopy and microanalysis
JF - Microscopy and microanalysis
SN - 1431-9276
ER -