Microstructural Effects on the Interfacial Adhesion of Nanometer-Thick Cu Films on Glass Substrates: Implications for Microelectronic Devices
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in: ACS Applied Nano Materials, Jahrgang 4.2021, Nr. 1, 28.12.2020, S. 61-70.
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
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TY - JOUR
T1 - Microstructural Effects on the Interfacial Adhesion of Nanometer-Thick Cu Films on Glass Substrates
T2 - Implications for Microelectronic Devices
AU - Lassnig, Alice
AU - Terziyska, Velislava L.
AU - Zalesak, Jakub
AU - Jörg, Tanja
AU - Toebbens, Daniel M.
AU - Griesser, Thomas
AU - Mitterer, Christian
AU - Pippan, Reinhard
AU - Cordill, Megan J.
N1 - Publisher Copyright: © 2020 American Chemical Society.
PY - 2020/12/28
Y1 - 2020/12/28
KW - brittle-ductile interface
KW - film microstructure
KW - nanosized Cu films
KW - spontaneous buckles
KW - thin film adhesion
UR - http://www.scopus.com/inward/record.url?scp=85099212374&partnerID=8YFLogxK
U2 - 10.1021/acsanm.0c02182
DO - 10.1021/acsanm.0c02182
M3 - Article
AN - SCOPUS:85099212374
VL - 4.2021
SP - 61
EP - 70
JO - ACS Applied Nano Materials
JF - ACS Applied Nano Materials
SN - 2574-0970
IS - 1
ER -