Mechanical failure dependence on the electrical history of lead zirconate titanate thin films
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in: Journal of the European Ceramic Society, Jahrgang 41, Nr. 4, 04.2021, S. 2465-2471.
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
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TY - JOUR
T1 - Mechanical failure dependence on the electrical history of lead zirconate titanate thin films
AU - Coleman, Kathlin
AU - Ritter, Maximilian
AU - Bermejo, Raul
AU - Trolier-McKinstry, S.
N1 - Publisher Copyright: © 2020 Elsevier Ltd
PY - 2021/4
Y1 - 2021/4
N2 - Piezoelectric micromechanical systems (piezoMEMS) are often subjected to harsh mechanical and electrical loads during operation. This study evaluates the effects of the electrical history of a lead zirconate titanate (PZT) layer on the electro-mechanical response and structural limits of multilayer stacks. Electro-mechanical characterization was performed under biaxial bending employing the Ball-on-three Balls (B3B) test on virgin, poled, and DC biased (80 kV/cm) samples. No significant effect on the characteristic strength or Weibull modulus of the stack was observed. However, the crack initiation stress was highest for the virgin samples (σ 0 ∼ 485 ± 30 MPa); this decreased for both poled samples (σ 0 ∼ 410 ± 30 MPa), and samples measured under 80 kV/cm (σ 0 ∼ 433 ± 30 MPa). in situ ε r and loss tangent measurements suggested electromechanical loading conditions can destabilize the domain structure. Overall, the electrical history and electromechanical loading conditions can reduce the PZT film's fracture resistance.
AB - Piezoelectric micromechanical systems (piezoMEMS) are often subjected to harsh mechanical and electrical loads during operation. This study evaluates the effects of the electrical history of a lead zirconate titanate (PZT) layer on the electro-mechanical response and structural limits of multilayer stacks. Electro-mechanical characterization was performed under biaxial bending employing the Ball-on-three Balls (B3B) test on virgin, poled, and DC biased (80 kV/cm) samples. No significant effect on the characteristic strength or Weibull modulus of the stack was observed. However, the crack initiation stress was highest for the virgin samples (σ 0 ∼ 485 ± 30 MPa); this decreased for both poled samples (σ 0 ∼ 410 ± 30 MPa), and samples measured under 80 kV/cm (σ 0 ∼ 433 ± 30 MPa). in situ ε r and loss tangent measurements suggested electromechanical loading conditions can destabilize the domain structure. Overall, the electrical history and electromechanical loading conditions can reduce the PZT film's fracture resistance.
KW - Ferroelectric properties (c)
KW - Fracture (c)
KW - Mechanical properties (c)
KW - PZT (d)
KW - Piezoelectric properties (c)
UR - http://www.scopus.com/inward/record.url?scp=85097073151&partnerID=8YFLogxK
U2 - https://doi.org/10.1016/j.jeurceramsoc.2020.11.002
DO - https://doi.org/10.1016/j.jeurceramsoc.2020.11.002
M3 - Article
VL - 41
SP - 2465
EP - 2471
JO - Journal of the European Ceramic Society
JF - Journal of the European Ceramic Society
SN - 0955-2219
IS - 4
ER -