TY - JOUR

T1 - Mechanical failure dependence on the electrical history of lead zirconate titanate thin films

AU - Coleman, Kathlin

AU - Ritter, Maximilian

AU - Bermejo, Raul

AU - Trolier-McKinstry, S.

N1 - Publisher Copyright: © 2020 Elsevier Ltd

PY - 2021/4

Y1 - 2021/4

N2 - Piezoelectric micromechanical systems (piezoMEMS) are often subjected to harsh mechanical and electrical loads during operation. This study evaluates the effects of the electrical history of a lead zirconate titanate (PZT) layer on the electro-mechanical response and structural limits of multilayer stacks. Electro-mechanical characterization was performed under biaxial bending employing the Ball-on-three Balls (B3B) test on virgin, poled, and DC biased (80 kV/cm) samples. No significant effect on the characteristic strength or Weibull modulus of the stack was observed. However, the crack initiation stress was highest for the virgin samples (σ 0 ∼ 485 ± 30 MPa); this decreased for both poled samples (σ 0 ∼ 410 ± 30 MPa), and samples measured under 80 kV/cm (σ 0 ∼ 433 ± 30 MPa). in situ ε r and loss tangent measurements suggested electromechanical loading conditions can destabilize the domain structure. Overall, the electrical history and electromechanical loading conditions can reduce the PZT film's fracture resistance.

AB - Piezoelectric micromechanical systems (piezoMEMS) are often subjected to harsh mechanical and electrical loads during operation. This study evaluates the effects of the electrical history of a lead zirconate titanate (PZT) layer on the electro-mechanical response and structural limits of multilayer stacks. Electro-mechanical characterization was performed under biaxial bending employing the Ball-on-three Balls (B3B) test on virgin, poled, and DC biased (80 kV/cm) samples. No significant effect on the characteristic strength or Weibull modulus of the stack was observed. However, the crack initiation stress was highest for the virgin samples (σ 0 ∼ 485 ± 30 MPa); this decreased for both poled samples (σ 0 ∼ 410 ± 30 MPa), and samples measured under 80 kV/cm (σ 0 ∼ 433 ± 30 MPa). in situ ε r and loss tangent measurements suggested electromechanical loading conditions can destabilize the domain structure. Overall, the electrical history and electromechanical loading conditions can reduce the PZT film's fracture resistance.

KW - Ferroelectric properties (c)

KW - Fracture (c)

KW - Mechanical properties (c)

KW - PZT (d)

KW - Piezoelectric properties (c)

UR - http://www.scopus.com/inward/record.url?scp=85097073151&partnerID=8YFLogxK

U2 - https://doi.org/10.1016/j.jeurceramsoc.2020.11.002

DO - https://doi.org/10.1016/j.jeurceramsoc.2020.11.002

M3 - Article

VL - 41

SP - 2465

EP - 2471

JO - Journal of the European Ceramic Society

JF - Journal of the European Ceramic Society

SN - 0955-2219

IS - 4

ER -