Magnetic field strength influence on the reactive magnetron sputter deposition of Ta2O5
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in: Journal of physics / D, Applied physics, Jahrgang 46, 2013, S. 335203-335210.
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
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TY - JOUR
T1 - Magnetic field strength influence on the reactive magnetron sputter deposition of Ta2O5
AU - Hollerweger, Robert
AU - Holec, David
AU - Paultisch, J.
AU - Rachbauer, Richard
AU - Polcik, P.
AU - Mayrhofer, P.H.
PY - 2013
Y1 - 2013
U2 - 10.1088/0022-3727/46/33/335203
DO - 10.1088/0022-3727/46/33/335203
M3 - Article
VL - 46
SP - 335203
EP - 335210
JO - Journal of physics / D, Applied physics
JF - Journal of physics / D, Applied physics
SN - 0022-3727
ER -