Influence of oxygen impurities on growth morphology, structure and mechanical properties of Ti–Al–N thin films
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in: Thin solid films, Jahrgang 603, 2016, S. 39-49.
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
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TY - JOUR
T1 - Influence of oxygen impurities on growth morphology, structure and mechanical properties of Ti–Al–N thin films
AU - Riedl, Helmut
AU - Munnik, F.
AU - Hutter, H.
AU - Mendez Martin, Francisca
AU - Kolozsvari, S.
AU - Bartosik, M.
AU - Mayrhofer, Paul Heinz
AU - Koller, Christian
AU - Rachbauer, Richard
PY - 2016
Y1 - 2016
U2 - http://dx.doi.org/10.1016/j.tsf.2016.01.039
DO - http://dx.doi.org/10.1016/j.tsf.2016.01.039
M3 - Article
VL - 603
SP - 39
EP - 49
JO - Thin solid films
JF - Thin solid films
SN - 0040-6090
ER -