Influence of oxygen impurities on growth morphology, structure and mechanical properties of Ti–Al–N thin films

Publikationen: Beitrag in FachzeitschriftArtikelForschung(peer-reviewed)

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Influence of oxygen impurities on growth morphology, structure and mechanical properties of Ti–Al–N thin films. / Riedl, Helmut; Munnik, F.; Hutter, H. et al.
in: Thin solid films, Jahrgang 603, 2016, S. 39-49.

Publikationen: Beitrag in FachzeitschriftArtikelForschung(peer-reviewed)

Vancouver

Riedl H, Munnik F, Hutter H, Mendez Martin F, Kolozsvari S, Bartosik M et al. Influence of oxygen impurities on growth morphology, structure and mechanical properties of Ti–Al–N thin films. Thin solid films. 2016;603:39-49. doi: http://dx.doi.org/10.1016/j.tsf.2016.01.039

Bibtex - Download

@article{2003215d71b845d3b5441744f6acef2e,
title = "Influence of oxygen impurities on growth morphology, structure and mechanical properties of Ti–Al–N thin films",
author = "Helmut Riedl and F. Munnik and H. Hutter and {Mendez Martin}, Francisca and S. Kolozsvari and M. Bartosik and Mayrhofer, {Paul Heinz} and Christian Koller and Richard Rachbauer",
year = "2016",
doi = "http://dx.doi.org/10.1016/j.tsf.2016.01.039",
language = "English",
volume = "603",
pages = "39--49",
journal = "Thin solid films",
issn = "0040-6090",
publisher = "Elsevier",

}

RIS (suitable for import to EndNote) - Download

TY - JOUR

T1 - Influence of oxygen impurities on growth morphology, structure and mechanical properties of Ti–Al–N thin films

AU - Riedl, Helmut

AU - Munnik, F.

AU - Hutter, H.

AU - Mendez Martin, Francisca

AU - Kolozsvari, S.

AU - Bartosik, M.

AU - Mayrhofer, Paul Heinz

AU - Koller, Christian

AU - Rachbauer, Richard

PY - 2016

Y1 - 2016

U2 - http://dx.doi.org/10.1016/j.tsf.2016.01.039

DO - http://dx.doi.org/10.1016/j.tsf.2016.01.039

M3 - Article

VL - 603

SP - 39

EP - 49

JO - Thin solid films

JF - Thin solid films

SN - 0040-6090

ER -