Influence of Ar gas pressure on ion energy and charge state distributions in pulsed cathodic arc plasmas from Nb-Al cathodes studied with high time resolution

Publikationen: Beitrag in FachzeitschriftArtikelForschung(peer-reviewed)

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@article{02aeee88b20a4542bdacaf5d61e485b3,
title = "Influence of Ar gas pressure on ion energy and charge state distributions in pulsed cathodic arc plasmas from Nb-Al cathodes studied with high time resolution",
author = "Siegfried Z{\"o}hrer and Andr{\'e} Anders and Robert Franz",
year = "2018",
doi = "10.1088/1361-6463/aaeecc",
language = "English",
pages = "0552011--05520114",
journal = "Journal of physics / D, Applied physics",
issn = "0022-3727",
publisher = "IOP Publishing Ltd.",

}

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TY - JOUR

T1 - Influence of Ar gas pressure on ion energy and charge state distributions in pulsed cathodic arc plasmas from Nb-Al cathodes studied with high time resolution

AU - Zöhrer, Siegfried

AU - Anders, André

AU - Franz, Robert

PY - 2018

Y1 - 2018

U2 - 10.1088/1361-6463/aaeecc

DO - 10.1088/1361-6463/aaeecc

M3 - Article

SP - 552011

EP - 5520114

JO - Journal of physics / D, Applied physics

JF - Journal of physics / D, Applied physics

SN - 0022-3727

ER -