Influence of Ar gas pressure on ion energy and charge state distributions in pulsed cathodic arc plasmas from Nb-Al cathodes studied with high time resolution
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in: Journal of physics / D, Applied physics, 2018, S. 0552011-05520114.
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
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TY - JOUR
T1 - Influence of Ar gas pressure on ion energy and charge state distributions in pulsed cathodic arc plasmas from Nb-Al cathodes studied with high time resolution
AU - Zöhrer, Siegfried
AU - Anders, André
AU - Franz, Robert
PY - 2018
Y1 - 2018
U2 - 10.1088/1361-6463/aaeecc
DO - 10.1088/1361-6463/aaeecc
M3 - Article
SP - 552011
EP - 5520114
JO - Journal of physics / D, Applied physics
JF - Journal of physics / D, Applied physics
SN - 0022-3727
ER -