Grid-assisted magnetron sputtering deposition of nitrogen graded TiN thin films
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Grid-assisted magnetron sputtering deposition of nitrogen graded TiN thin films. / da Silva, Felipe C.; Tunes, Matheus; Edmondson, Philip D. et al.
in: SN applied sciences , Jahrgang 2020, Nr. 2, 864, 09.04.2020.
in: SN applied sciences , Jahrgang 2020, Nr. 2, 864, 09.04.2020.
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
Harvard
da Silva, FC, Tunes, M, Edmondson, PD, Lima, NB, Sagás, JC, Fontana, LC & Schön, CG 2020, 'Grid-assisted magnetron sputtering deposition of nitrogen graded TiN thin films', SN applied sciences , Jg. 2020, Nr. 2, 864. https://doi.org/10.1007/s42452-020-2617-3
APA
da Silva, F. C., Tunes, M., Edmondson, P. D., Lima, N. B., Sagás, J. C., Fontana, L. C., & Schön, C. G. (2020). Grid-assisted magnetron sputtering deposition of nitrogen graded TiN thin films. SN applied sciences , 2020(2), Artikel 864. Vorzeitige Online-Publikation. https://doi.org/10.1007/s42452-020-2617-3
Vancouver
da Silva FC, Tunes M, Edmondson PD, Lima NB, Sagás JC, Fontana LC et al. Grid-assisted magnetron sputtering deposition of nitrogen graded TiN thin films. SN applied sciences . 2020 Apr 9;2020(2):864. Epub 2020 Apr 9. doi: 10.1007/s42452-020-2617-3
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Bibtex - Download
@article{3069202124c44716add8bf23773a5510,
title = "Grid-assisted magnetron sputtering deposition of nitrogen graded TiN thin films",
author = "{da Silva}, {Felipe C.} and Matheus Tunes and Edmondson, {Philip D.} and Lima, {Nelson B.} and Sag{\'a}s, {Julio C.} and Fontana, {Luis C.} and Sch{\"o}n, {Cl{\'a}udio G.}",
year = "2020",
month = apr,
day = "9",
doi = "10.1007/s42452-020-2617-3",
language = "English",
volume = "2020",
journal = "SN applied sciences ",
issn = "2523-3971 ",
publisher = "Springer International Publishing",
number = "2",
}
RIS (suitable for import to EndNote) - Download
TY - JOUR
T1 - Grid-assisted magnetron sputtering deposition of nitrogen graded TiN thin films
AU - da Silva, Felipe C.
AU - Tunes, Matheus
AU - Edmondson, Philip D.
AU - Lima, Nelson B.
AU - Sagás, Julio C.
AU - Fontana, Luis C.
AU - Schön, Cláudio G.
PY - 2020/4/9
Y1 - 2020/4/9
U2 - 10.1007/s42452-020-2617-3
DO - 10.1007/s42452-020-2617-3
M3 - Article
VL - 2020
JO - SN applied sciences
JF - SN applied sciences
SN - 2523-3971
IS - 2
M1 - 864
ER -
