Enhanced Ti0.84Ta0.16N diffusion barriers, grown by a hybrid sputtering technique with no substrate heating, between Si (001) wafers and Cu overlayers
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in: Scientific reports (London : Nature Publishing Group), 2018, S. 1-9.
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
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TY - JOUR
T1 - Enhanced Ti0.84Ta0.16N diffusion barriers, grown by a hybrid sputtering technique with no substrate heating, between Si (001) wafers and Cu overlayers
AU - Mühlbacher, Marlene
AU - Greczynski, Grzegorz
AU - Sartory, Bernhard
AU - Schalk, Nina
AU - Lu, Jun
AU - Petrov, Ivan
AU - Greene, J.E.
AU - Hultman, Lars
AU - Mitterer, Christian
PY - 2018
Y1 - 2018
U2 - 10.1038/s41598-018-23782-9
DO - 10.1038/s41598-018-23782-9
M3 - Article
SP - 1
EP - 9
JO - Scientific reports (London : Nature Publishing Group)
JF - Scientific reports (London : Nature Publishing Group)
SN - 2045-2322
ER -