Compositional and structural evolution of sputtered Ti-Al-N

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Compositional and structural evolution of sputtered Ti-Al-N. / Chen, Li; Moser, Martin; Du, Yong et al.
in: Thin solid films, 2009, S. 6635-6641.

Publikationen: Beitrag in FachzeitschriftArtikelForschung(peer-reviewed)

Bibtex - Download

@article{d825a248bcd34e509e74e06a77180271,
title = "Compositional and structural evolution of sputtered Ti-Al-N",
author = "Li Chen and Martin Moser and Yong Du and Mayrhofer, {Paul Heinz}",
year = "2009",
language = "English",
pages = "6635--6641",
journal = "Thin solid films",
issn = "0040-6090",
publisher = "Elsevier",

}

RIS (suitable for import to EndNote) - Download

TY - JOUR

T1 - Compositional and structural evolution of sputtered Ti-Al-N

AU - Chen, Li

AU - Moser, Martin

AU - Du, Yong

AU - Mayrhofer, Paul Heinz

PY - 2009

Y1 - 2009

M3 - Article

SP - 6635

EP - 6641

JO - Thin solid films

JF - Thin solid films

SN - 0040-6090

ER -