Al-Cr-N thin film design for high temperature applications
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Publikationen: Thesis / Studienabschlussarbeiten und Habilitationsschriften › Dissertation
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T1 - Al-Cr-N thin film design for high temperature applications
AU - Willmann, Herbert
N1 - no embargo
PY - 2007
Y1 - 2007
N2 - In this PhD thesis the microstructural design of AlxCr1-xN thin films (0 0.7, however, in this work the cubic structure could be stabilized up to x=0.81 by epitaxial growth. The addition of Al improves the oxidation resistance and has a stabilizing effect on the Cr-N bonds. The onset of dissociation is shifted to temperatures >1000 °C where Al-Cr-N decomposes to form Cr via the intermediate step of Cr2N under the release of nitrogen. Polycrystalline Al0.68Cr0.32N films show precipitation hardening due to wurtzite AlN formation, however, causing reduced Cr-N bond stability. Suppressing precipitation by reduction of possible nucleation sites (i.e. single crystal films) or lower Al-content in the film results in a conserved hardness of 30 GPa up to 1000 °C.
AB - In this PhD thesis the microstructural design of AlxCr1-xN thin films (0 0.7, however, in this work the cubic structure could be stabilized up to x=0.81 by epitaxial growth. The addition of Al improves the oxidation resistance and has a stabilizing effect on the Cr-N bonds. The onset of dissociation is shifted to temperatures >1000 °C where Al-Cr-N decomposes to form Cr via the intermediate step of Cr2N under the release of nitrogen. Polycrystalline Al0.68Cr0.32N films show precipitation hardening due to wurtzite AlN formation, however, causing reduced Cr-N bond stability. Suppressing precipitation by reduction of possible nucleation sites (i.e. single crystal films) or lower Al-content in the film results in a conserved hardness of 30 GPa up to 1000 °C.
KW - Al-Cr-N
KW - Cr-Al-N
KW - STA
KW - DSC
KW - TGA
KW - MS
KW - XRD
KW - HR-XRD
KW - HT-XRD
KW - TEM
KW - STEM
KW - thin film coating precipitation
KW - decompositions
KW - epitaxy
KW - RSM
KW - PVD
KW - arc evaporiation
KW - magnetron sputtering
KW - Al-Cr-N
KW - Cr-Al-N
KW - STA
KW - DSC
KW - TGA
KW - MS
KW - TEM
KW - XRD
KW - Ausscheidung
KW - Phasentransformation
KW - Epitaxie
KW - Schichtwachstum
KW - Dünnschichttechnik
KW - Lichtbogenverdampfung
KW - Kathodenzerstäubung
M3 - Doctoral Thesis
ER -
