A capacitance ultrasonic transducer with micromachined backplate for fast flow measurements in hot pulsating gases
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
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in: IEEE sensors journal, Jahrgang 6, Nr. 4, 1661569, 01.08.2006, S. 898-905.
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
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TY - JOUR
T1 - A capacitance ultrasonic transducer with micromachined backplate for fast flow measurements in hot pulsating gases
AU - Schröder, Andreas
AU - Kupnik, Mario
AU - O'Leary, Paul
AU - Benes, Ewald
AU - Gröschl, Martin
PY - 2006/8/1
Y1 - 2006/8/1
KW - Capacitance transducer
KW - Exhaust gas
KW - High-temperature ultrasonic transducer
KW - Mass flowmeter
KW - Pulsating gas flow
KW - Ultrasonic flowmeter (UFM)
UR - http://www.scopus.com/inward/record.url?scp=33746899057&partnerID=8YFLogxK
U2 - 10.1109/JSEN.2006.877975
DO - 10.1109/JSEN.2006.877975
M3 - Article
AN - SCOPUS:33746899057
VL - 6
SP - 898
EP - 905
JO - IEEE sensors journal
JF - IEEE sensors journal
SN - 1530-437X
IS - 4
M1 - 1661569
ER -