Neuester Forschungsoutput

• Strain Engineering in Trench Power MOSFETs: Characterization and Optimization of Mechanical and Electrical Transistor Properties

  Publikationen: Thesis / Studienabschlussarbeiten und Habilitationsschriften › Dissertation

• X-ray nanodiffraction analysis of residual stresses in polysilicon electrodes of vertical power transistors

  Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)

• Nanobeam electron diffraction strain mapping in monocrystalline silicon of modern trench power MOSFETs

  Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)