Latest Research Output

• Strain Engineering in Trench Power MOSFETs: Characterization and Optimization of Mechanical and Electrical Transistor Properties

  Research output: Thesis › Doctoral Thesis

• X-ray nanodiffraction analysis of residual stresses in polysilicon electrodes of vertical power transistors

  Research output: Contribution to journal › Article › Research › peer-review

• Nanobeam electron diffraction strain mapping in monocrystalline silicon of modern trench power MOSFETs

  Research output: Contribution to journal › Article › Research › peer-review