Thermal stability of sputtered alumina films

Research output: Contribution to conferencePosterResearchpeer-review

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Thermal stability of sputtered alumina films. / Edlmayr, Viktoria; Walter, Claudia; Mitterer, Christian.
2007. Poster session presented at Symposium on Reactive Sputter Deposition, Leoben, Austria.

Research output: Contribution to conferencePosterResearchpeer-review

Harvard

Edlmayr, V, Walter, C & Mitterer, C 2007, 'Thermal stability of sputtered alumina films', Symposium on Reactive Sputter Deposition, Leoben, Austria, 6/12/07 - 7/12/07.

APA

Edlmayr, V., Walter, C., & Mitterer, C. (2007). Thermal stability of sputtered alumina films. Poster session presented at Symposium on Reactive Sputter Deposition, Leoben, Austria.

Vancouver

Edlmayr V, Walter C, Mitterer C. Thermal stability of sputtered alumina films. 2007. Poster session presented at Symposium on Reactive Sputter Deposition, Leoben, Austria.

Author

Edlmayr, Viktoria ; Walter, Claudia ; Mitterer, Christian. / Thermal stability of sputtered alumina films. Poster session presented at Symposium on Reactive Sputter Deposition, Leoben, Austria.

Bibtex - Download

@conference{4ea57eac96a54ee68c32e7949cb76d05,
title = "Thermal stability of sputtered alumina films",
author = "Viktoria Edlmayr and Claudia Walter and Christian Mitterer",
year = "2007",
language = "English",
note = "Symposium on Reactive Sputter Deposition ; Conference date: 06-12-2007 Through 07-12-2007",

}

RIS (suitable for import to EndNote) - Download

TY - CONF

T1 - Thermal stability of sputtered alumina films

AU - Edlmayr, Viktoria

AU - Walter, Claudia

AU - Mitterer, Christian

PY - 2007

Y1 - 2007

M3 - Poster

T2 - Symposium on Reactive Sputter Deposition

Y2 - 6 December 2007 through 7 December 2007

ER -