Thermal Stability of Nanostructured TiN-TiB2 Thin Films

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Details

Translated title of the contributionThermal Stability of Nanostructured TiN-TiB2 Thin Films
Original languageEnglish
Title of host publication2004 MRS Fall Meeting
Subtitle of host publicationSymposium U – Stability of Thin Films and Nanostructures
PublisherMaterials Research Society : MRS
Pages95-100
ISBN (electronic)1558998063
ISBN (print)9781558998063
DOIs
Publication statusPublished - 2005

Publication series

NameMRS Online Proceedings Library
Volume854
ISSN (Print)1946-4274
ISSN (electronic)1946-4274