Studies on the morphology of Al2O3 thin films grown by Atomic Layer Epitaxy
Research output: Contribution to journal › Article › Research › peer-review
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Studies on the morphology of Al2O3 thin films grown by Atomic Layer Epitaxy. / Prohaska, Thomas; Ritala, M.; Saloniemi, H. et al.
In: Thin solid films, 1996, p. 54-58.
In: Thin solid films, 1996, p. 54-58.
Research output: Contribution to journal › Article › Research › peer-review
Harvard
Prohaska, T, Ritala, M, Saloniemi, H, Leskelä, M & FRIEDBACHER, G 1996, 'Studies on the morphology of Al2O3 thin films grown by Atomic Layer Epitaxy', Thin solid films, pp. 54-58.
APA
Prohaska, T., Ritala, M., Saloniemi, H., Leskelä, M., & FRIEDBACHER, G. (1996). Studies on the morphology of Al2O3 thin films grown by Atomic Layer Epitaxy. Thin solid films, 54-58.
Vancouver
Prohaska T, Ritala M, Saloniemi H, Leskelä M, FRIEDBACHER G. Studies on the morphology of Al2O3 thin films grown by Atomic Layer Epitaxy. Thin solid films. 1996; 54-58.
Author
Bibtex - Download
@article{f8b36ba8ac904dffaeb5686e9efbf30e,
title = "Studies on the morphology of Al2O3 thin films grown by Atomic Layer Epitaxy",
author = "Thomas Prohaska and M. Ritala and H. Saloniemi and M. Leskel{\"a} and G FRIEDBACHER",
year = "1996",
language = "English",
pages = " 54--58",
journal = "Thin solid films",
issn = "0040-6090",
publisher = "Elsevier",
}
RIS (suitable for import to EndNote) - Download
TY - JOUR
T1 - Studies on the morphology of Al2O3 thin films grown by Atomic Layer Epitaxy
AU - Prohaska, Thomas
AU - Ritala, M.
AU - Saloniemi, H.
AU - Leskelä, M.
AU - FRIEDBACHER, G
PY - 1996
Y1 - 1996
M3 - Article
SP - 54
EP - 58
JO - Thin solid films
JF - Thin solid films
SN - 0040-6090
ER -
