Sputter deposited TiAlN/AlTiN and CrAlN/TiAlN: multilayer coatings

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Blumauer, S 2021, 'Sputter deposited TiAlN/AlTiN and CrAlN/TiAlN: multilayer coatings', Dipl.-Ing., Montanuniversitaet Leoben (000).

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Blumauer, S. (2021). Sputter deposited TiAlN/AlTiN and CrAlN/TiAlN: multilayer coatings. [Master's Thesis, Montanuniversitaet Leoben (000)].

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@mastersthesis{7cd2da4e0c4a4230b525dd3de1e59fce,
title = "Sputter deposited TiAlN/AlTiN and CrAlN/TiAlN: multilayer coatings",
abstract = "Multi-layered coating architectures allow to achieve properties which cannot be obtained by single layers. Thus, the aim of the present thesis was to synthesize TiAlN/AlTiN and CrAlN/TiAlN multilayer coatings and compare their microstructure and mechanical properties to the corresponding Ti1-xAlxN and Cr1-xAlxN single layers. Four single layer coatings with an Al/Ti atomic ratio of 50/50, 70/30 and 80/20 as well as Al/Cr 85/15 were deposited by reactive magnetron sputtering in a laboratory deposition unit. For the nine multilayer coatings, Al/Ti 50/50 layers were combined with the respective other compositions at different sublayer thicknesses. The microstructure and mechanical properties were investigated by X-ray diffraction and nanoindentation. Cross-sections of all single layer coatings and selected multilayers were studied by scanning electron microscopy and energy dispersive X-ray spectroscopy. The application of a multilayered coating architecture allows to stabilize the face-centred cubic (fcc) structure especially in TiAlN/AlTiN coatings. In contrast to the Al0.7Ti0.3N and Al0.8Ti0.2N single layers, which exhibited a dual-phase fcc/wurtzitic (w) and a pure w-structure, respectively, the Ti0.5Al0.5N/Al0.7Ti0.3N multilayers were single-phase fcc and the Ti0.5Al0.5N/Al0.8Ti0.2N multilayers only showed minor w-phase fractions. The stabilization of the fcc-regime of the CrAlN/TiAlN coatings seems to be less pronounced compared to the TiAlN/AlTiN coatings. In general, the CrAlN/TiAlN coatings showed a lower hardness and Young{\textquoteright}s modulus compared to the TiAlN/AlTiN coatings. No significant influence of the sublayer thickness on the mechanical properties could be observed.",
keywords = "Magnetron Sputtern, Multilagenschichten, Einzellagenschichten, TiAlN, CrAlN, R{\"o}ntgenbeugung, Nanoindentation, Rasterelektronenmikrospie, energiedispersiver R{\"o}ntgenspektroskopie, Magnetron Sputtering, mulit-layered, single layer, TiAlN, CrAlN, X-ray diffraction, nanoindentation, scanning electron microscopy, energy-dispersive X-ray spectroscopy",
author = "Stefan Blumauer",
note = "embargoed until null",
year = "2021",
language = "English",
school = "Montanuniversitaet Leoben (000)",

}

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TY - THES

T1 - Sputter deposited TiAlN/AlTiN and CrAlN/TiAlN

T2 - multilayer coatings

AU - Blumauer, Stefan

N1 - embargoed until null

PY - 2021

Y1 - 2021

N2 - Multi-layered coating architectures allow to achieve properties which cannot be obtained by single layers. Thus, the aim of the present thesis was to synthesize TiAlN/AlTiN and CrAlN/TiAlN multilayer coatings and compare their microstructure and mechanical properties to the corresponding Ti1-xAlxN and Cr1-xAlxN single layers. Four single layer coatings with an Al/Ti atomic ratio of 50/50, 70/30 and 80/20 as well as Al/Cr 85/15 were deposited by reactive magnetron sputtering in a laboratory deposition unit. For the nine multilayer coatings, Al/Ti 50/50 layers were combined with the respective other compositions at different sublayer thicknesses. The microstructure and mechanical properties were investigated by X-ray diffraction and nanoindentation. Cross-sections of all single layer coatings and selected multilayers were studied by scanning electron microscopy and energy dispersive X-ray spectroscopy. The application of a multilayered coating architecture allows to stabilize the face-centred cubic (fcc) structure especially in TiAlN/AlTiN coatings. In contrast to the Al0.7Ti0.3N and Al0.8Ti0.2N single layers, which exhibited a dual-phase fcc/wurtzitic (w) and a pure w-structure, respectively, the Ti0.5Al0.5N/Al0.7Ti0.3N multilayers were single-phase fcc and the Ti0.5Al0.5N/Al0.8Ti0.2N multilayers only showed minor w-phase fractions. The stabilization of the fcc-regime of the CrAlN/TiAlN coatings seems to be less pronounced compared to the TiAlN/AlTiN coatings. In general, the CrAlN/TiAlN coatings showed a lower hardness and Young’s modulus compared to the TiAlN/AlTiN coatings. No significant influence of the sublayer thickness on the mechanical properties could be observed.

AB - Multi-layered coating architectures allow to achieve properties which cannot be obtained by single layers. Thus, the aim of the present thesis was to synthesize TiAlN/AlTiN and CrAlN/TiAlN multilayer coatings and compare their microstructure and mechanical properties to the corresponding Ti1-xAlxN and Cr1-xAlxN single layers. Four single layer coatings with an Al/Ti atomic ratio of 50/50, 70/30 and 80/20 as well as Al/Cr 85/15 were deposited by reactive magnetron sputtering in a laboratory deposition unit. For the nine multilayer coatings, Al/Ti 50/50 layers were combined with the respective other compositions at different sublayer thicknesses. The microstructure and mechanical properties were investigated by X-ray diffraction and nanoindentation. Cross-sections of all single layer coatings and selected multilayers were studied by scanning electron microscopy and energy dispersive X-ray spectroscopy. The application of a multilayered coating architecture allows to stabilize the face-centred cubic (fcc) structure especially in TiAlN/AlTiN coatings. In contrast to the Al0.7Ti0.3N and Al0.8Ti0.2N single layers, which exhibited a dual-phase fcc/wurtzitic (w) and a pure w-structure, respectively, the Ti0.5Al0.5N/Al0.7Ti0.3N multilayers were single-phase fcc and the Ti0.5Al0.5N/Al0.8Ti0.2N multilayers only showed minor w-phase fractions. The stabilization of the fcc-regime of the CrAlN/TiAlN coatings seems to be less pronounced compared to the TiAlN/AlTiN coatings. In general, the CrAlN/TiAlN coatings showed a lower hardness and Young’s modulus compared to the TiAlN/AlTiN coatings. No significant influence of the sublayer thickness on the mechanical properties could be observed.

KW - Magnetron Sputtern

KW - Multilagenschichten

KW - Einzellagenschichten

KW - TiAlN

KW - CrAlN

KW - Röntgenbeugung

KW - Nanoindentation

KW - Rasterelektronenmikrospie

KW - energiedispersiver Röntgenspektroskopie

KW - Magnetron Sputtering

KW - mulit-layered

KW - single layer

KW - TiAlN

KW - CrAlN

KW - X-ray diffraction

KW - nanoindentation

KW - scanning electron microscopy

KW - energy-dispersive X-ray spectroscopy

M3 - Master's Thesis

ER -