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  1. 1994
  2. Published

    Surface roughness reduction in Atomic Layer Epitaxy growth of titanium dioxide thin films

    Prohaska, T., Ritala, M., Leskelä, M., Niinistö, L., FRIEDBACHER, G. & GRASSERBAUER, M., 1994, In: Thin solid films. p. 155-162

    Research output: Contribution to journal › Article › Research › peer-review

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