Reactively-sputtered super-hydrophilic ultra-thin titania films deposited at 120°C
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In: Materials Research Express : MRX, Vol. 10.2023, No. 11, 115501, 01.11.2023.
Research output: Contribution to journal › Article › Research › peer-review
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TY - JOUR
T1 - Reactively-sputtered super-hydrophilic ultra-thin titania films deposited at 120°C
AU - Kaidatzis, Andreas
AU - Mouti, Nafsika-Maria
AU - Arfanis, Michalis
AU - Papadimitropoulos, Giorgos
AU - Mitterer, Christian
AU - Falaras, Polycarpos
AU - Giannakopoulos, Konstantinos
N1 - Publisher Copyright: © 2023 The Author(s). Published by IOP Publishing Ltd.
PY - 2023/11/1
Y1 - 2023/11/1
N2 - We investigate super-hydrophilic TiO2 (titania) films for concentrated solar-thermal power applications. Reactive magnetron sputtering has been used to deposit 8 to 12 nm thick titania thin films onto borosilicate microscope glass slides, low-Fe extra-clear architectural glass, or Si(100) wafers with a 500 nm thick thermal SiO2 layer. The effects of deposition temperature and O2 fraction of the O2/Ar working gas were investigated. We demonstrate the importance of the O2 fraction for obtaining optically transparent, super-hydrophilic (contact angle below 1°) thin films. In particular, we show that as the O2 fraction increases, contact angle decreases, obtaining super-hydrophilic titania thin films at deposition temperatures as low as 120 °C. Our work enables to develop low thermal budget cost-efficient industrial synthesis processes, paving the way for commercial applications.
AB - We investigate super-hydrophilic TiO2 (titania) films for concentrated solar-thermal power applications. Reactive magnetron sputtering has been used to deposit 8 to 12 nm thick titania thin films onto borosilicate microscope glass slides, low-Fe extra-clear architectural glass, or Si(100) wafers with a 500 nm thick thermal SiO2 layer. The effects of deposition temperature and O2 fraction of the O2/Ar working gas were investigated. We demonstrate the importance of the O2 fraction for obtaining optically transparent, super-hydrophilic (contact angle below 1°) thin films. In particular, we show that as the O2 fraction increases, contact angle decreases, obtaining super-hydrophilic titania thin films at deposition temperatures as low as 120 °C. Our work enables to develop low thermal budget cost-efficient industrial synthesis processes, paving the way for commercial applications.
UR - http://www.scopus.com/inward/record.url?scp=85176801503&partnerID=8YFLogxK
U2 - 10.1088/2053-1591/ad0450
DO - 10.1088/2053-1591/ad0450
M3 - Article
VL - 10.2023
JO - Materials Research Express : MRX
JF - Materials Research Express : MRX
SN - 2053-1591
IS - 11
M1 - 115501
ER -
