Properties of reactively sputtered W-Si-N films
Research output: Contribution to journal › Article › Research › peer-review
Standard
Properties of reactively sputtered W-Si-N films. / Musil, J.; Daniel, R.; Soldán, J. et al.
In: Surface & coatings technology, 2006.
In: Surface & coatings technology, 2006.
Research output: Contribution to journal › Article › Research › peer-review
Harvard
Musil, J, Daniel, R, Soldán, J & Zeman, P 2006, 'Properties of reactively sputtered W-Si-N films', Surface & coatings technology. https://doi.org/10.1016/j.surfcoat.2004.12.004
APA
Musil, J., Daniel, R., Soldán, J., & Zeman, P. (2006). Properties of reactively sputtered W-Si-N films. Surface & coatings technology. https://doi.org/10.1016/j.surfcoat.2004.12.004
Vancouver
Musil J, Daniel R, Soldán J, Zeman P. Properties of reactively sputtered W-Si-N films. Surface & coatings technology. 2006. doi: 10.1016/j.surfcoat.2004.12.004
Author
Bibtex - Download
@article{158c6bd7e9fd4a2ca9b0e9f106fc43f5,
title = "Properties of reactively sputtered W-Si-N films",
author = "J. Musil and R. Daniel and J. Sold{\'a}n and P. Zeman",
year = "2006",
doi = "10.1016/j.surfcoat.2004.12.004",
language = "English",
journal = "Surface & coatings technology",
issn = "0257-8972",
publisher = "Elsevier",
}
RIS (suitable for import to EndNote) - Download
TY - JOUR
T1 - Properties of reactively sputtered W-Si-N films
AU - Musil, J.
AU - Daniel, R.
AU - Soldán, J.
AU - Zeman, P.
PY - 2006
Y1 - 2006
UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-32844462100&partnerID=MN8TOARS
U2 - 10.1016/j.surfcoat.2004.12.004
DO - 10.1016/j.surfcoat.2004.12.004
M3 - Article
JO - Surface & coatings technology
JF - Surface & coatings technology
SN - 0257-8972
ER -
