Plasma CVD of alumina – unsolved problems
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Plasma CVD of alumina – unsolved problems. / Laimer, J.; Fink, M.; Mitterer, Christian et al.
In: Vacuum, Vol. 80, 2005, p. 141-145.
In: Vacuum, Vol. 80, 2005, p. 141-145.
Research output: Contribution to journal › Article › Research › peer-review
Harvard
Laimer, J, Fink, M, Mitterer, C & Störi, H 2005, 'Plasma CVD of alumina – unsolved problems', Vacuum, vol. 80, pp. 141-145. https://doi.org/10.1016/j.vacuum.2005.08.018
APA
Laimer, J., Fink, M., Mitterer, C., & Störi, H. (2005). Plasma CVD of alumina – unsolved problems. Vacuum, 80, 141-145. https://doi.org/10.1016/j.vacuum.2005.08.018
Vancouver
Laimer J, Fink M, Mitterer C, Störi H. Plasma CVD of alumina – unsolved problems. Vacuum. 2005;80:141-145. doi: 10.1016/j.vacuum.2005.08.018
Author
Bibtex - Download
@article{7e27cd3581a5425b9418d4fa2f11eb48,
title = "Plasma CVD of alumina – unsolved problems",
author = "J. Laimer and M. Fink and Christian Mitterer and H. St{\"o}ri",
year = "2005",
doi = "10.1016/j.vacuum.2005.08.018",
language = "English",
volume = "80",
pages = "141--145",
journal = "Vacuum",
issn = "0042-207X",
publisher = "Elsevier",
}
RIS (suitable for import to EndNote) - Download
TY - JOUR
T1 - Plasma CVD of alumina – unsolved problems
AU - Laimer, J.
AU - Fink, M.
AU - Mitterer, Christian
AU - Störi, H.
PY - 2005
Y1 - 2005
U2 - 10.1016/j.vacuum.2005.08.018
DO - 10.1016/j.vacuum.2005.08.018
M3 - Article
VL - 80
SP - 141
EP - 145
JO - Vacuum
JF - Vacuum
SN - 0042-207X
ER -
