TY - JOUR

T1 - Novel ambient-condition solid-state synthesis route of nanocrystalline TiN thin films via spark plasma ablation deposition

AU - Radovanović-Perić, Floren

AU - Burtscher, Michael

AU - Panžić, Ivana

AU - Kiener, Daniel

AU - Mandić, Vilko

N1 - Publisher Copyright: © 2024 Elsevier Ltd and Techna Group S.r.l.

PY - 2025/2

Y1 - 2025/2

N2 - By utilizing a novel, green and efficient spark plasma ablation deposition, <10 nm size titanium nitride nanoparticles were obtained. The prepared nanopowder material can be utilized for the deposition of a nanocrystalline thin film. The solid-state synthesis was performed completely at ambient conditions, without the use of solvents and post-processing. Transmission electron microscopy confirmed the size of the nanoparticles within the range of less than 10 nm with primary particles as small as 3 nm, while selective area diffraction confirmed fits cubic titanium nitride (TiN) crystal structure. The geometry (thickness and surface roughness) of the deposited thin films could be varied depending on the sparking current and flow rate. Raman spectroscopy suggested the specific morphology that stems from the plastic deformation of nanoparticles upon collision with the substrate might influence the nanolocal structural environment due to a high surface contribution of tensile stress.

AB - By utilizing a novel, green and efficient spark plasma ablation deposition, <10 nm size titanium nitride nanoparticles were obtained. The prepared nanopowder material can be utilized for the deposition of a nanocrystalline thin film. The solid-state synthesis was performed completely at ambient conditions, without the use of solvents and post-processing. Transmission electron microscopy confirmed the size of the nanoparticles within the range of less than 10 nm with primary particles as small as 3 nm, while selective area diffraction confirmed fits cubic titanium nitride (TiN) crystal structure. The geometry (thickness and surface roughness) of the deposited thin films could be varied depending on the sparking current and flow rate. Raman spectroscopy suggested the specific morphology that stems from the plastic deformation of nanoparticles upon collision with the substrate might influence the nanolocal structural environment due to a high surface contribution of tensile stress.

KW - Nanolocal homogeneity

KW - Nanoparticles

KW - Spark plasma ablation deposition

KW - Thin film

UR - http://www.scopus.com/inward/record.url?scp=85200557072&partnerID=8YFLogxK

U2 - 10.1016/j.ceramint.2024.08.028

DO - 10.1016/j.ceramint.2024.08.028

M3 - Article

AN - SCOPUS:85200557072

VL - 51

SP - 5576

EP - 5582

JO - Ceramics International

JF - Ceramics International

SN - 0272-8842

IS - 5

ER -