TY - THES

T1 - Multiphysics simulations of PVT process for SiC growth

AU - Moya Merino, Carlos

N1 - no embargo

PY - 2024

Y1 - 2024

N2 - In the recent years, silicon carbide (SiC) is emerging as a main material in the semiconductor industry thanks to its outstanding properties. The production method is known as Physical Vapor Transport (PVT), nonetheless, the setup configuration does not allow to get information in-situ. Therefore, computational simulations became the main approach to control and predict the PVT parameters, especially using Finite Element Method (FEM) modelling. Although the construction of a FEM model for modelling a growth process could be complex due to the physics involved. This master thesis deals with the validation of different algorithm to account heat transfer by radiation physics. COMSOL Multiphysics is a FEM software which has different algorithms (direct area integration, hemicube and ray shooting) to describe surface-to-surface radiation. These algorithms are tested and validate to determine their accuracy in a simple and initial PVT model, which could be the basis for more complex models.

AB - In the recent years, silicon carbide (SiC) is emerging as a main material in the semiconductor industry thanks to its outstanding properties. The production method is known as Physical Vapor Transport (PVT), nonetheless, the setup configuration does not allow to get information in-situ. Therefore, computational simulations became the main approach to control and predict the PVT parameters, especially using Finite Element Method (FEM) modelling. Although the construction of a FEM model for modelling a growth process could be complex due to the physics involved. This master thesis deals with the validation of different algorithm to account heat transfer by radiation physics. COMSOL Multiphysics is a FEM software which has different algorithms (direct area integration, hemicube and ray shooting) to describe surface-to-surface radiation. These algorithms are tested and validate to determine their accuracy in a simple and initial PVT model, which could be the basis for more complex models.

KW - Siliziumkarbid

KW - physikalischer Gasphasentransport

KW - Finite Elemente Methode

KW - Modellierung der Wärmeübertragung

KW - strahlende Wärmeübertragung

KW - silicon carbide

KW - physical vapor transport

KW - finite element method

KW - heat transfer modelling

KW - radiative heat transfer

U2 - 10.34901/mul.pub.2024.073

DO - 10.34901/mul.pub.2024.073

M3 - Master's Thesis

ER -