Interfacial and inter- diffusion studies of epitaxial TiN/Cu layers on MgO (001) - A comprehensive approach by high resolution TEM and APT

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Interfacial and inter- diffusion studies of epitaxial TiN/Cu layers on MgO (001) - A comprehensive approach by high resolution TEM and APT. / Mühlbacher, Marlene; Mendez Martin, Francisca; Sartory, B. et al.
2013. 60th International AVS Symposium and Exhibition.

Research output: Contribution to conferencePresentationResearchpeer-review

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@conference{06a698e232d84a838915c32dfd06f73d,
title = "Interfacial and inter- diffusion studies of epitaxial TiN/Cu layers on MgO (001) - A comprehensive approach by high resolution TEM and APT",
author = "Marlene M{\"u}hlbacher and {Mendez Martin}, Francisca and B. Sartory and Jozef Keckes and J. Lu and Hultman Lars and Christian Mitterer",
year = "2013",
language = "English",
note = "60th International AVS Symposium and Exhibition ; Conference date: 27-10-2013",

}

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TY - CONF

T1 - Interfacial and inter- diffusion studies of epitaxial TiN/Cu layers on MgO (001) - A comprehensive approach by high resolution TEM and APT

AU - Mühlbacher, Marlene

AU - Mendez Martin, Francisca

AU - Sartory, B.

AU - Keckes, Jozef

AU - Lu, J.

AU - Lars, Hultman

AU - Mitterer, Christian

PY - 2013

Y1 - 2013

M3 - Presentation

T2 - 60th International AVS Symposium and Exhibition

Y2 - 27 October 2013

ER -