Influence of deposition conditions on texture development and mechanical properties of TiN coatings

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Translated title of the contributionInfluence of deposition conditions on texture development and mechanical properties of TiN coatings
Original languageEnglish
Pages (from-to)1052-1058
JournalInternational journal of materials research : IJMR ; Zeitschrift für Metallkunde
Volume100
Publication statusPublished - 2009