Homogeneity of industrial scale thermal CVD processes for TiCN hard coatings
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
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| Translated title of the contribution | Homogeneity of industrial scale thermal CVD processes for TiCN hard coatings |
|---|---|
| Original language | English |
| Title of host publication | proc. 17th International Plansee Seminar |
| Pages | 1-8 |
| Publication status | Published - 2009 |
