Drifting potential humps in ionization zones: The "propeller blades" of high power impulse magnetron sputtering

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Translated title of the contributionDrifting potential humps in ionization zones: The "propeller blades" of high power impulse magnetron sputtering
Original languageEnglish
Pages (from-to)144103-1-144103-4
JournalApplied physics letters
Volume103
Publication statusPublished - 2013