Development of crystallinity and morphology in hafnium dioxide thin films grown by Atomic Layer Epitaxy
Research output: Contribution to journal › Article › Research › peer-review
Standard
Development of crystallinity and morphology in hafnium dioxide thin films grown by Atomic Layer Epitaxy. / Prohaska, Thomas; Ritala, M.; Leskelä, M. et al.
In: Thin solid films, 1994, p. 72-80.
In: Thin solid films, 1994, p. 72-80.
Research output: Contribution to journal › Article › Research › peer-review
Harvard
Prohaska, T, Ritala, M, Leskelä, M, Niinistö, L, FRIEDBACHER, G & GRASSERBAUER, M 1994, 'Development of crystallinity and morphology in hafnium dioxide thin films grown by Atomic Layer Epitaxy', Thin solid films, pp. 72-80.
APA
Prohaska, T., Ritala, M., Leskelä, M., Niinistö, L., FRIEDBACHER, G., & GRASSERBAUER, M. (1994). Development of crystallinity and morphology in hafnium dioxide thin films grown by Atomic Layer Epitaxy. Thin solid films, 72-80.
Vancouver
Prohaska T, Ritala M, Leskelä M, Niinistö L, FRIEDBACHER G, GRASSERBAUER M. Development of crystallinity and morphology in hafnium dioxide thin films grown by Atomic Layer Epitaxy. Thin solid films. 1994;72-80.
Author
Bibtex - Download
@article{926d20691c9a4b1ca508085240ef457d,
title = "Development of crystallinity and morphology in hafnium dioxide thin films grown by Atomic Layer Epitaxy",
author = "Thomas Prohaska and M. Ritala and M. Leskel{\"a} and L. Niinist{\"o} and G FRIEDBACHER and M GRASSERBAUER",
year = "1994",
language = "English",
pages = "72--80",
journal = "Thin solid films",
issn = "0040-6090",
publisher = "Elsevier",
}
RIS (suitable for import to EndNote) - Download
TY - JOUR
T1 - Development of crystallinity and morphology in hafnium dioxide thin films grown by Atomic Layer Epitaxy
AU - Prohaska, Thomas
AU - Ritala, M.
AU - Leskelä, M.
AU - Niinistö, L.
AU - FRIEDBACHER, G
AU - GRASSERBAUER, M
PY - 1994
Y1 - 1994
M3 - Article
SP - 72
EP - 80
JO - Thin solid films
JF - Thin solid films
SN - 0040-6090
ER -
