TY - BOOK

T1 - Chemical Vapor Deposition of Titanium Nitride based Hard Coatings

AU - Wagner, Josef

N1 - no embargo

PY - 2007

Y1 - 2007

N2 - The deposition of TiN by thermal chemical vapor deposition (CVD) is well-established in cutting tool industry due to the balanced combination of hardness, oxidation resistance and adhesion. In this work, the coating properties of titanium nitride were examined and, moreover, systematically altered by the addition of C, B, or Al to form either single-phase Ti(C,N) coatings, dual-phase coatings within the ternary system Ti-N-B, or metastable coatings in the Ti-Al-N system. It has been shown that the mechanical, thermal and, ultimately the tribological properties can be modified over a wide range by adjustment of the process conditions and the addition of different alloying elements. The high impact of the deposition temperature on the microstructure was shown for coatings of pure TiN. Fine-grained textured structures provide a high toughness and an enhanced wear resistance. The properties can be adjusted from super-hard Ti-N-B coatings by a high-phase fraction of TiB2 to low friction coatings of Ti(C,N). It has been proven for the first time that the deposition of metastable TiAlN coatings is feasible by thermal CVD on an industrial scale. The results provide a basis for further developments with regard to commercial fcc-(Ti,Al)N coatings.

AB - The deposition of TiN by thermal chemical vapor deposition (CVD) is well-established in cutting tool industry due to the balanced combination of hardness, oxidation resistance and adhesion. In this work, the coating properties of titanium nitride were examined and, moreover, systematically altered by the addition of C, B, or Al to form either single-phase Ti(C,N) coatings, dual-phase coatings within the ternary system Ti-N-B, or metastable coatings in the Ti-Al-N system. It has been shown that the mechanical, thermal and, ultimately the tribological properties can be modified over a wide range by adjustment of the process conditions and the addition of different alloying elements. The high impact of the deposition temperature on the microstructure was shown for coatings of pure TiN. Fine-grained textured structures provide a high toughness and an enhanced wear resistance. The properties can be adjusted from super-hard Ti-N-B coatings by a high-phase fraction of TiB2 to low friction coatings of Ti(C,N). It has been proven for the first time that the deposition of metastable TiAlN coatings is feasible by thermal CVD on an industrial scale. The results provide a basis for further developments with regard to commercial fcc-(Ti,Al)N coatings.

KW - CVD

KW - Titannitride

KW - Titanbornitrid

KW - Titanborid

KW - Titankarbonitrid

KW - Titanaluminiumnitrid

KW - Tribologie

KW - Reibung

KW - Verschleiß

KW - Textur

KW - Struktur

KW - Härte

KW - Oxidation

KW - Ramanspektroskopie

KW - Rutil Anatas

KW - CVD

KW - Titanium nitride

KW - Titanium boronitride

KW - Titanium boride

KW - Titanium carbonitride

KW - Titanium aluminumnitride

KW - Tribology

KW - Friction

KW - Wear

KW - Texture

KW - Structure

KW - Hardness

KW - Oxidation

KW - Raman spectroscopy

KW - Rutile Anatase

M3 - Doctoral Thesis

ER -