TY - THES

T1 - Characterization of CrN films on MgO by Transmission Electron Microscopy

AU - Kormout, Karoline

N1 - embargoed until null

PY - 2012

Y1 - 2012

N2 - The microstructure of two CrN thin films and their interface with an MgO substrate were investigated with Transmission Electron Microscopy (TEM) and Electron Energy-Loss Spectroscopy (EELS). Sample A, a Cr/CrN bi-layer, had a single crystalline structure. Sample B, a CrN single layer with a thickness of more than 1 µm, formed a polycrystalline columnar configuration. High-Resolution TEM (HRTEM) studies revealed that both layers were grown epitaxially on the substrate and the generation of misfit dislocations at the interface has been observed. In both layers edge type dislocations in end-on orientation were found at the CrN/MgO interface and characterized. For a detailed investigation of the strain fields across the interface and around the dislocations cores the Geometric Phase Analysis was applied. Displacement and two-dimensional relative strain maps were calculated. In addition EELS measurements were realized for the CrN single layer. A spatial distribution of the two components (CrN film and MgO substrate) was performed with Multiple Linear Least Squares fitting technique (MLLS fitting).

AB - The microstructure of two CrN thin films and their interface with an MgO substrate were investigated with Transmission Electron Microscopy (TEM) and Electron Energy-Loss Spectroscopy (EELS). Sample A, a Cr/CrN bi-layer, had a single crystalline structure. Sample B, a CrN single layer with a thickness of more than 1 µm, formed a polycrystalline columnar configuration. High-Resolution TEM (HRTEM) studies revealed that both layers were grown epitaxially on the substrate and the generation of misfit dislocations at the interface has been observed. In both layers edge type dislocations in end-on orientation were found at the CrN/MgO interface and characterized. For a detailed investigation of the strain fields across the interface and around the dislocations cores the Geometric Phase Analysis was applied. Displacement and two-dimensional relative strain maps were calculated. In addition EELS measurements were realized for the CrN single layer. A spatial distribution of the two components (CrN film and MgO substrate) was performed with Multiple Linear Least Squares fitting technique (MLLS fitting).

KW - chromium nitride (CrN)

KW - thin film

KW - hard coating

KW - transmission electron microscope (TEM)

KW - electron energy-loss spectroscopy (EELS)

KW - geometric phase analysis (GPA)

KW - Chromnitrid (CrN)

KW - dünne Schichten

KW - Hartstoffbeschichtung

KW - Transmissionselektronenmikroskopie (TEM)

KW - Elektronen-Energieverlust-Spektroskopie (EELS)

KW - Geometrische Phasenanalyse (GPA)

M3 - Diploma Thesis

ER -