Thin solid films, ‎0040-6090

Journal

ISSNs	0040-6090

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Research output

1996
Published
Studies on the morphology of Al2O3 thin films grown by Atomic Layer Epitaxy
Prohaska, T., Ritala, M., Saloniemi, H., Leskelä, M. & FRIEDBACHER, G., 1996, In: Thin solid films. p. 54-58
Research output: Contribution to journal › Article › Research › peer-review
1994
Published
Development of crystallinity and morphology in hafnium dioxide thin films grown by Atomic Layer Epitaxy
Prohaska, T., Ritala, M., Leskelä, M., Niinistö, L., FRIEDBACHER, G. & GRASSERBAUER, M., 1994, In: Thin solid films. p. 72-80
Research output: Contribution to journal › Article › Research › peer-review
Published
Surface roughness reduction in Atomic Layer Epitaxy growth of titanium dioxide thin films
Prohaska, T., Ritala, M., Leskelä, M., Niinistö, L., FRIEDBACHER, G. & GRASSERBAUER, M., 1994, In: Thin solid films. p. 155-162
Research output: Contribution to journal › Article › Research › peer-review

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