Evolution of the microstructure of sputter deposited TaAlON thin films with increasing oxygen partial pressure

Activity: Talk or presentation Oral presentation

Participants

Date

26 Apr 202130 Apr 2021

Nina Schalk - Speaker

Christian Saringer - contributor

Alexander Fian - contributor

Velislava Terziyska - contributor

Michael Tkadletz - contributor

26 Apr 202130 Apr 2021

Event (Conference)

TitleICMCTF 2021
Period26/04/2130/04/21
Locationonline