Water-Developable Poly(2-Oxazoline)-Based Negative Photoresists
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in: Macromolecular rapid communications, Jahrgang 33.2012, Nr. 5, 2012, S. 396-400.
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
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TY - JOUR
T1 - Water-Developable Poly(2-Oxazoline)-Based Negative Photoresists
AU - Schenk, Verena
AU - Ellmaier, Lisa
AU - Rossegger, Elisabeth
AU - Edler, Matthias
AU - Grießer, Thomas
AU - Weidinger, Gerald
AU - Wiesbrock, Frank
PY - 2012
Y1 - 2012
U2 - 10.1002/marc.201100717
DO - 10.1002/marc.201100717
M3 - Article
VL - 33.2012
SP - 396
EP - 400
JO - Macromolecular rapid communications
JF - Macromolecular rapid communications
SN - 1022-1336
IS - 5
ER -