TY - THES

T1 - Qualification Process of 3D Printed High-Performance Polymer Parts, for Lam Wet Clean Applications

AU - Glanznig, Alexander René

N1 - embargoed until 25-02-2027

PY - 2022

Y1 - 2022

N2 - Over the last decade, an enormous development of Additive Manufacturing has been observed. Due to increased printing speed and material availability, 3D printing is not considered for hobby or prototyping applications but also series production. The technology significantly shortens development cycles and flexibility at small and middle-size production volumes. Lam Research recognized the potential of this technology and invested resources in its development and qualification for its own needs. This research focuses on evaluating Additive Manufacturing technology maturity and its potential for Lam Clean applications. This research features defining and aligning on evaluation criteria and requirements for Lam's parts. A market screening was conducted for high-performance printable "pure" polymers and printing technics. Identified materials were ordered in test specimen design. Different tests, e.g., chemical compatibility, material purity as per SEMI F57, particle performance, micrographics, and functional tests, e.g., leak test and post-processing tests, were conducted on the evaluation of the sample materials/technics. As a result, different technology gaps were identified. In the end, a summarized discussion was made, and recommendations for Lam stakeholders were presented. The FDM technics enable using pure (virgin) materials such as PVDF and PEEK, leading to better chemical compatibility and leach outperformance. However, the technology is not recommended for high volumes and big parts due to low printing speed. In comparison, the SLS/PBF has more challenges in archiving the same purity level of the FDM process material. Due to the transformation to the powder material, more process steps and adders are added, affecting the purity. The powder-based process generates loose particles on the surface. Chemical processing is possible for PP material but not for PFA, this is a limitation. The print speed is very recommended for volume production, also due to the possibility of filling the whole build volume with parts, the build costs can be reduced. Some available Materials/technologies can support "Use Case 2" and "3" right away (e.g., SLS PP, and FDM PVDF, PP, PEEK). For "Use Case 1," part material impurity must be reduced, mainly via raw material process optimization, only PP400 is reaching the requirements. A leach-out test of chemically post-processed parts is recommended to identify the impact of treating media and if the smoothing capsulate impurities. SLS/PBF, MJF, and SLA are currently recommended for big and small parts volume production. FDM can be used for small parts.

AB - Over the last decade, an enormous development of Additive Manufacturing has been observed. Due to increased printing speed and material availability, 3D printing is not considered for hobby or prototyping applications but also series production. The technology significantly shortens development cycles and flexibility at small and middle-size production volumes. Lam Research recognized the potential of this technology and invested resources in its development and qualification for its own needs. This research focuses on evaluating Additive Manufacturing technology maturity and its potential for Lam Clean applications. This research features defining and aligning on evaluation criteria and requirements for Lam's parts. A market screening was conducted for high-performance printable "pure" polymers and printing technics. Identified materials were ordered in test specimen design. Different tests, e.g., chemical compatibility, material purity as per SEMI F57, particle performance, micrographics, and functional tests, e.g., leak test and post-processing tests, were conducted on the evaluation of the sample materials/technics. As a result, different technology gaps were identified. In the end, a summarized discussion was made, and recommendations for Lam stakeholders were presented. The FDM technics enable using pure (virgin) materials such as PVDF and PEEK, leading to better chemical compatibility and leach outperformance. However, the technology is not recommended for high volumes and big parts due to low printing speed. In comparison, the SLS/PBF has more challenges in archiving the same purity level of the FDM process material. Due to the transformation to the powder material, more process steps and adders are added, affecting the purity. The powder-based process generates loose particles on the surface. Chemical processing is possible for PP material but not for PFA, this is a limitation. The print speed is very recommended for volume production, also due to the possibility of filling the whole build volume with parts, the build costs can be reduced. Some available Materials/technologies can support "Use Case 2" and "3" right away (e.g., SLS PP, and FDM PVDF, PP, PEEK). For "Use Case 1," part material impurity must be reduced, mainly via raw material process optimization, only PP400 is reaching the requirements. A leach-out test of chemically post-processed parts is recommended to identify the impact of treating media and if the smoothing capsulate impurities. SLS/PBF, MJF, and SLA are currently recommended for big and small parts volume production. FDM can be used for small parts.

KW - SLS

KW - PBF

KW - Hochleistungspolymer

KW - 3DDruck

KW - Qualificationsprozess

KW - Lam Research

KW - Glätten

KW - PP

KW - Fluoropolymere

KW - 3D Printing

KW - Fluoropolymers

KW - Additive Manufacturing

KW - Post Processing

KW - SLS

KW - PBF

KW - High Performance Polymers

KW - Lam Research

KW - Semiconductor Industry

KW - Chemical Vapor Smoothing

KW - Qualification Process

KW - Chemical Resistance

KW - Leach Out Data

M3 - Master's Thesis

ER -