The established industrial processes used for the growth of TiC _xN _1-x coatings by chemical vapor deposition (CVD) suffer from substantial limitations, either in regard of brittle phase formation or restriction in the C/(C + N) ratio. Using the alternative C precursor C ₂H ₆ allows to overcome these issues. Thus, within this work, the microstructure, phase composition, micro-mechanical and thermo-physical properties of CVD TiC _xN _1-x coatings grown with C ₂H ₆ were investigated. Through adjustment of the C ₂H ₆ and N ₂ flow in the feed gas, the C/(C + N) ratio in the coatings was varied between pure TiN and TiC _0.80N _0.20. All coatings are characterized by a single-phase face centered cubic structure. The 〈110〉 fiber texture present in all coatings becomes more pronounced with increasing C content. None of the investigated coatings showed thermal cracks on the surface. The thermal conductivity decreases with addition of C from 45 ± 5 W/mK in TiN to 32 ± 3 W/mK in all ternary TiC _xN _1-x coatings. TiC _0.47N _0.53 exhibits the highest hardness (30.0 ± 1.4 GPa), while TiC _0.63N _0.36 turned out as the stiffest coating with a Young's modulus of 576 ± 23 GPa. The fracture stress σ _F and toughness K _IC are superior in coatings with moderate C and N content, with TiC _0.63N _0.37 being the strongest (σ _F = 7.7 ± 0.4 GPa) and TiC _0.47N _0.53 (K _IC = 4.4 ± 0.3 MPa m ^1/2) the toughest within this series. Coatings with moderate to high C content were found to exhibit a microstructure provoking a lower thermal conductivity and improved mechanical properties compared to those with a low C/(C + N) ratio.