Interface and stability analysis of Tantalum- and Titanium nitride thin films onto Lithiumniobate

Publikationen: Beitrag in FachzeitschriftArtikelForschung(peer-reviewed)

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Interface and stability analysis of Tantalum- and Titanium nitride thin films onto Lithiumniobate. / Vogel, U.; Oswald, Steffen; Eckert, Jürgen.
in: Applied surface science, Jahrgang 425.2017, Nr. 15 December, 12.2017, S. 254-260.

Publikationen: Beitrag in FachzeitschriftArtikelForschung(peer-reviewed)

Vancouver

Vogel U, Oswald S, Eckert J. Interface and stability analysis of Tantalum- and Titanium nitride thin films onto Lithiumniobate. Applied surface science. 2017 Dez;425.2017(15 December):254-260. Epub 2017 Jun 30. doi: 10.1016/j.apsusc.2017.06.312

Author

Vogel, U. ; Oswald, Steffen ; Eckert, Jürgen. / Interface and stability analysis of Tantalum- and Titanium nitride thin films onto Lithiumniobate. in: Applied surface science. 2017 ; Jahrgang 425.2017, Nr. 15 December. S. 254-260.

Bibtex - Download

@article{0ca72b7de66d4314834f1db9110e53a8,
title = "Interface and stability analysis of Tantalum- and Titanium nitride thin films onto Lithiumniobate",
author = "U. Vogel and Steffen Oswald and J{\"u}rgen Eckert",
year = "2017",
month = dec,
doi = "10.1016/j.apsusc.2017.06.312",
language = "English",
volume = "425.2017",
pages = "254--260",
journal = "Applied surface science",
issn = "0169-4332",
publisher = "Elsevier",
number = "15 December",

}

RIS (suitable for import to EndNote) - Download

TY - JOUR

T1 - Interface and stability analysis of Tantalum- and Titanium nitride thin films onto Lithiumniobate

AU - Vogel, U.

AU - Oswald, Steffen

AU - Eckert, Jürgen

PY - 2017/12

Y1 - 2017/12

U2 - 10.1016/j.apsusc.2017.06.312

DO - 10.1016/j.apsusc.2017.06.312

M3 - Article

VL - 425.2017

SP - 254

EP - 260

JO - Applied surface science

JF - Applied surface science

SN - 0169-4332

IS - 15 December

ER -