Influence of the nitrogen content on the structure and properties of MoNbTaVW high entropy alloy thin films
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in: Journal of alloys and compounds, Jahrgang 850.2021, Nr. 5 January, 156740, 20.08.2020.
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
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TY - JOUR
T1 - Influence of the nitrogen content on the structure and properties of MoNbTaVW high entropy alloy thin films
AU - Xia, Ao
AU - Dedoncker, Robin
AU - Glushko, Oleksandr
AU - Cordill, Megan J.
AU - Depla, Diederik
AU - Franz, Robert
N1 - Publisher Copyright: © 2020 Elsevier B.V.
PY - 2020/8/20
Y1 - 2020/8/20
N2 - The influence of nitrogen incorporation on the chemical composition, structure, mechanical, and electrical properties of refractory (MoNbTaVW) 1−xN x high entropy alloy thin films is investigated. The films were synthesized by two different physical vapor deposition methods, cathodic arc deposition and direct current magnetron sputtering, onto silicon and polyimide substrates. Regardless of the deposition method, a change from body centered cubic to face centered cubic structure was observed with increasing nitrogen content in the film. This structural change was accompanied by an increase in hardness as measured by nanoindentation but also by a material embrittlement as determined from tensile straining tests.
AB - The influence of nitrogen incorporation on the chemical composition, structure, mechanical, and electrical properties of refractory (MoNbTaVW) 1−xN x high entropy alloy thin films is investigated. The films were synthesized by two different physical vapor deposition methods, cathodic arc deposition and direct current magnetron sputtering, onto silicon and polyimide substrates. Regardless of the deposition method, a change from body centered cubic to face centered cubic structure was observed with increasing nitrogen content in the film. This structural change was accompanied by an increase in hardness as measured by nanoindentation but also by a material embrittlement as determined from tensile straining tests.
UR - http://www.scopus.com/inward/record.url?scp=85089753678&partnerID=8YFLogxK
U2 - 10.1016/j.jallcom.2020.156740
DO - 10.1016/j.jallcom.2020.156740
M3 - Article
VL - 850.2021
JO - Journal of alloys and compounds
JF - Journal of alloys and compounds
SN - 0925-8388
IS - 5 January
M1 - 156740
ER -