Influence of the deposition parameters on the nanolamella periodicity of chemical vapor deposited Ti1-xAlxN
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
Standard
in: Materials letters, Jahrgang 305.2021, Nr. 15 December, 130819, 15.12.2021.
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
Harvard
APA
Vancouver
Author
Bibtex - Download
}
RIS (suitable for import to EndNote) - Download
TY - JOUR
T1 - Influence of the deposition parameters on the nanolamella periodicity of chemical vapor deposited Ti1-xAlxN
AU - Saringer, Christian
AU - Tkadletz, Michael
AU - Thurner, Josef
AU - Czettl, Christoph
AU - Schalk, Nina
N1 - Publisher Copyright: © 2021
PY - 2021/12/15
Y1 - 2021/12/15
N2 - Owing to its extraordinary nanolamellar microstructure, chemical vapor deposited Ti 1-xAl xN has gained considerable interest in the recent years. However, the formation mechanism of the nanolamellae is not yet understood and is currently subject of intense research. In this publication we have deposited Ti 1-xAl xN coatings at varying temperature, pressure and rotation speed of the central gas feed. Transmission electron microscopy has been conducted in order to quantify the lamella periodicity and correlate it with the deposition parameters. This work demonstrates that nanolamellae can be obtained over a wide range of deposition parameters and, more importantly, that the periodicity does not seem to depend on the gas feed rotation but can be correlated with deposition temperature and pressure.
AB - Owing to its extraordinary nanolamellar microstructure, chemical vapor deposited Ti 1-xAl xN has gained considerable interest in the recent years. However, the formation mechanism of the nanolamellae is not yet understood and is currently subject of intense research. In this publication we have deposited Ti 1-xAl xN coatings at varying temperature, pressure and rotation speed of the central gas feed. Transmission electron microscopy has been conducted in order to quantify the lamella periodicity and correlate it with the deposition parameters. This work demonstrates that nanolamellae can be obtained over a wide range of deposition parameters and, more importantly, that the periodicity does not seem to depend on the gas feed rotation but can be correlated with deposition temperature and pressure.
UR - http://www.scopus.com/inward/record.url?scp=85114463505&partnerID=8YFLogxK
U2 - 10.1016/j.matlet.2021.130819
DO - 10.1016/j.matlet.2021.130819
M3 - Article
VL - 305.2021
JO - Materials letters
JF - Materials letters
SN - 0167-577X
IS - 15 December
M1 - 130819
ER -
