Influence of Annealing Treatments on the Adhesion Metal Barrier Layers

Publikationen: KonferenzbeitragVortragForschung(peer-reviewed)

Standard

Influence of Annealing Treatments on the Adhesion Metal Barrier Layers. / Kleinbichler, Andreas; Zechner, J.; Cordill, Megan.
2016. Thin Film and Small Scale Mechanical Behavior (GRS), Lewiston, Maine, USA / Vereinigte Staaten.

Publikationen: KonferenzbeitragVortragForschung(peer-reviewed)

Harvard

Kleinbichler, A, Zechner, J & Cordill, M 2016, 'Influence of Annealing Treatments on the Adhesion Metal Barrier Layers', Thin Film and Small Scale Mechanical Behavior (GRS), Lewiston, USA / Vereinigte Staaten, 23/07/16 - 24/07/16.

APA

Kleinbichler, A., Zechner, J., & Cordill, M. (2016). Influence of Annealing Treatments on the Adhesion Metal Barrier Layers. Thin Film and Small Scale Mechanical Behavior (GRS), Lewiston, Maine, USA / Vereinigte Staaten.

Vancouver

Kleinbichler A, Zechner J, Cordill M. Influence of Annealing Treatments on the Adhesion Metal Barrier Layers. 2016. Thin Film and Small Scale Mechanical Behavior (GRS), Lewiston, Maine, USA / Vereinigte Staaten.

Author

Kleinbichler, Andreas ; Zechner, J. ; Cordill, Megan. / Influence of Annealing Treatments on the Adhesion Metal Barrier Layers. Thin Film and Small Scale Mechanical Behavior (GRS), Lewiston, Maine, USA / Vereinigte Staaten.

Bibtex - Download

@conference{0c72dede84d145d68aca8350149e41bc,
title = "Influence of Annealing Treatments on the Adhesion Metal Barrier Layers",
author = "Andreas Kleinbichler and J. Zechner and Megan Cordill",
year = "2016",
language = "English",
note = "Gordon Research Seminar ; Conference date: 23-07-2016 Through 24-07-2016",

}

RIS (suitable for import to EndNote) - Download

TY - CONF

T1 - Influence of Annealing Treatments on the Adhesion Metal Barrier Layers

AU - Kleinbichler, Andreas

AU - Zechner, J.

AU - Cordill, Megan

PY - 2016

Y1 - 2016

M3 - Presentation

T2 - Gordon Research Seminar

Y2 - 23 July 2016 through 24 July 2016

ER -