TY - JOUR

T1 - Improved electro-mechanical reliability of flexible systems with alloyed Mo-Ta adhesion layers

AU - Kreiml, Patrice

AU - Rausch, Martin

AU - Terziyska, Velislava

AU - Köstenbauer, Harald

AU - Winkler, Jörg

AU - Mitterer, Christian

AU - Cordill, Megan J.

N1 - Publisher Copyright: © 2021 Elsevier B.V.

PY - 2021/1/9

Y1 - 2021/1/9

N2 - Sputter deposited Mo/Al/Mo multilayers are widely used material systems for electrodes in display technologies. In this study, the electro-mechanical behavior of simplified bilayer versions was improved for flexible applications through substitution of the Mo by Mo-Ta alloy layers. Sputter deposited Al/Mo-Ta bilayers were tested under uniaxial tensile and cyclic bending loads. Compared to similar Al/Mo bilayers from previous studies, the Mo-Ta interlayer with 50 at.% Ta improved the crack onset strain under tensile load by more than 1% strain. Furthermore, after 50 000 cycles under 1.3% bending strain, the Al/Mo-Ta bilayers were nearly undamaged and experienced a relatively small electrical resistance increase of 25%, compared to Al/Mo bilayers, which were 40 to 100 times higher. This work shows that the substitution of the brittle Mo interlayer with a more ductile Mo-Ta interlayer can improve the performance and lifetime of the electrodes and is more suitable for flexible displays than the currently used materials.

AB - Sputter deposited Mo/Al/Mo multilayers are widely used material systems for electrodes in display technologies. In this study, the electro-mechanical behavior of simplified bilayer versions was improved for flexible applications through substitution of the Mo by Mo-Ta alloy layers. Sputter deposited Al/Mo-Ta bilayers were tested under uniaxial tensile and cyclic bending loads. Compared to similar Al/Mo bilayers from previous studies, the Mo-Ta interlayer with 50 at.% Ta improved the crack onset strain under tensile load by more than 1% strain. Furthermore, after 50 000 cycles under 1.3% bending strain, the Al/Mo-Ta bilayers were nearly undamaged and experienced a relatively small electrical resistance increase of 25%, compared to Al/Mo bilayers, which were 40 to 100 times higher. This work shows that the substitution of the brittle Mo interlayer with a more ductile Mo-Ta interlayer can improve the performance and lifetime of the electrodes and is more suitable for flexible displays than the currently used materials.

UR - http://www.scopus.com/inward/record.url?scp=85099614994&partnerID=8YFLogxK

U2 - 10.1016/j.tsf.2021.138533

DO - 10.1016/j.tsf.2021.138533

M3 - Article

VL - 720.2021

JO - Thin solid films

JF - Thin solid films

SN - 0040-6090

IS - 28 February

M1 - 138533

ER -