TY - JOUR

T1 - Extracting flow curves from nano-sized metal layers in thin film systems

AU - Kozic, Darjan

AU - Maier-Kiener, Verena

AU - Konetschnik, Ruth

AU - Gänser, Hans-Peter

AU - Antretter, Thomas

AU - Brunner, Roland

AU - Kiener, Daniel

PY - 2016/12/7

Y1 - 2016/12/7

N2 - In this work the plastic deformation behavior of nanocrystalline 500 nm thick tungsten and copper films deposited on a silicon substrate is investigated. Nanoindentation experiments utilizing a spherical tip are used to determine the mechanical response of the film stacks. The data is used as input for an inverse optimization routine coupled to finite element simulations in order to determine the flow curves of the individual materials. We elaborate on how locally resolved residual stresses, microstructure, and external dimensions determine and influence the flow behavior and compare the results to the corresponding bulk materials.

AB - In this work the plastic deformation behavior of nanocrystalline 500 nm thick tungsten and copper films deposited on a silicon substrate is investigated. Nanoindentation experiments utilizing a spherical tip are used to determine the mechanical response of the film stacks. The data is used as input for an inverse optimization routine coupled to finite element simulations in order to determine the flow curves of the individual materials. We elaborate on how locally resolved residual stresses, microstructure, and external dimensions determine and influence the flow behavior and compare the results to the corresponding bulk materials.

KW - Constitutive modeling

KW - Finite element analysis

KW - Multilayer thin films

KW - Nanoindentation

KW - Residual stresses

UR - http://www.scopus.com/inward/record.url?scp=85002737636&partnerID=8YFLogxK

U2 - 10.1016/j.scriptamat.2016.11.008

DO - 10.1016/j.scriptamat.2016.11.008

M3 - Article

AN - SCOPUS:85002737636

VL - 130.2017

SP - 143

EP - 147

JO - Scripta materialia

JF - Scripta materialia

SN - 1359-6462

IS - 15 March

ER -