TY - JOUR

T1 - Experimental Evaluation of Vibration Influence on a Resonant MEMS Scanning System for Automotive Lidars

AU - Yoo, Han Woong

AU - Riegler, Rene

AU - Brunner, David

AU - Albert, Stephan Gerhard

AU - Thurner, Thomas

AU - Schitter, Georg

N1 - Publisher Copyright: © 1982-2012 IEEE.

PY - 2021/3/17

Y1 - 2021/3/17

N2 - This article demonstrates a vibration test for a resonant MEMS scanning system in operation to evaluate the vibration immunity for automotive lidar applications. The MEMS mirror has a reinforcement structure on the backside of the mirror, causing vibration coupling by a mismatch between the center of mass and the rotation axis. An analysis of energy variation is proposed, showing the direction dependency of vibration coupling. Vibration influences are evaluated by transient vibration response and vibration frequency sweep using a single tone vibration for translational y- and z- axis. The measurement results demonstrate standard deviation (STD) amplitude and frequency errors are up to 1.64% and 0.26%, respectively, for 2grms single tone vibrations on y axis. The simulation results also show a good agreement with both measurements, proving the proposed vibration coupling mechanism of the MEMS mirror. The phased locked loop (PLL) improves the STD amplitude and frequency errors to 0.91% and 0.15% for y axis vibration, corresponding to 44.4% and 43.0% reduction, respectively, showing the benefit of a controlled MEMS mirror for reliable automotive MEMS lidars.

AB - This article demonstrates a vibration test for a resonant MEMS scanning system in operation to evaluate the vibration immunity for automotive lidar applications. The MEMS mirror has a reinforcement structure on the backside of the mirror, causing vibration coupling by a mismatch between the center of mass and the rotation axis. An analysis of energy variation is proposed, showing the direction dependency of vibration coupling. Vibration influences are evaluated by transient vibration response and vibration frequency sweep using a single tone vibration for translational y- and z- axis. The measurement results demonstrate standard deviation (STD) amplitude and frequency errors are up to 1.64% and 0.26%, respectively, for 2grms single tone vibrations on y axis. The simulation results also show a good agreement with both measurements, proving the proposed vibration coupling mechanism of the MEMS mirror. The phased locked loop (PLL) improves the STD amplitude and frequency errors to 0.91% and 0.15% for y axis vibration, corresponding to 44.4% and 43.0% reduction, respectively, showing the benefit of a controlled MEMS mirror for reliable automotive MEMS lidars.

KW - Automotive applications

KW - laser radar

KW - microelectromechanical system (MEMS)

KW - micromirrors

KW - phase locked loops (PLL)

KW - robustness

KW - system testing

UR - http://www.scopus.com/inward/record.url?scp=85103178955&partnerID=8YFLogxK

U2 - 10.1109/TIE.2021.3065608

DO - 10.1109/TIE.2021.3065608

M3 - Article

AN - SCOPUS:85103178955

VL - 69.2021

SP - 3099

EP - 3108

JO - IEEE transactions on industrial electronics

JF - IEEE transactions on industrial electronics

SN - 0278-0046

IS - 3

ER -