Experimental Evaluation of Vibration Influence on a Resonant MEMS Scanning System for Automotive Lidars
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in: IEEE transactions on industrial electronics, Jahrgang 69.2021, Nr. 3, 17.03.2021, S. 3099-3108.
Publikationen: Beitrag in Fachzeitschrift › Artikel › Forschung › (peer-reviewed)
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TY - JOUR
T1 - Experimental Evaluation of Vibration Influence on a Resonant MEMS Scanning System for Automotive Lidars
AU - Yoo, Han Woong
AU - Riegler, Rene
AU - Brunner, David
AU - Albert, Stephan Gerhard
AU - Thurner, Thomas
AU - Schitter, Georg
N1 - Publisher Copyright: © 1982-2012 IEEE.
PY - 2021/3/17
Y1 - 2021/3/17
N2 - This article demonstrates a vibration test for a resonant MEMS scanning system in operation to evaluate the vibration immunity for automotive lidar applications. The MEMS mirror has a reinforcement structure on the backside of the mirror, causing vibration coupling by a mismatch between the center of mass and the rotation axis. An analysis of energy variation is proposed, showing the direction dependency of vibration coupling. Vibration influences are evaluated by transient vibration response and vibration frequency sweep using a single tone vibration for translational y- and z- axis. The measurement results demonstrate standard deviation (STD) amplitude and frequency errors are up to 1.64% and 0.26%, respectively, for 2grms single tone vibrations on y axis. The simulation results also show a good agreement with both measurements, proving the proposed vibration coupling mechanism of the MEMS mirror. The phased locked loop (PLL) improves the STD amplitude and frequency errors to 0.91% and 0.15% for y axis vibration, corresponding to 44.4% and 43.0% reduction, respectively, showing the benefit of a controlled MEMS mirror for reliable automotive MEMS lidars.
AB - This article demonstrates a vibration test for a resonant MEMS scanning system in operation to evaluate the vibration immunity for automotive lidar applications. The MEMS mirror has a reinforcement structure on the backside of the mirror, causing vibration coupling by a mismatch between the center of mass and the rotation axis. An analysis of energy variation is proposed, showing the direction dependency of vibration coupling. Vibration influences are evaluated by transient vibration response and vibration frequency sweep using a single tone vibration for translational y- and z- axis. The measurement results demonstrate standard deviation (STD) amplitude and frequency errors are up to 1.64% and 0.26%, respectively, for 2grms single tone vibrations on y axis. The simulation results also show a good agreement with both measurements, proving the proposed vibration coupling mechanism of the MEMS mirror. The phased locked loop (PLL) improves the STD amplitude and frequency errors to 0.91% and 0.15% for y axis vibration, corresponding to 44.4% and 43.0% reduction, respectively, showing the benefit of a controlled MEMS mirror for reliable automotive MEMS lidars.
KW - Automotive applications
KW - laser radar
KW - microelectromechanical system (MEMS)
KW - micromirrors
KW - phase locked loops (PLL)
KW - robustness
KW - system testing
UR - http://www.scopus.com/inward/record.url?scp=85103178955&partnerID=8YFLogxK
U2 - 10.1109/TIE.2021.3065608
DO - 10.1109/TIE.2021.3065608
M3 - Article
AN - SCOPUS:85103178955
VL - 69.2021
SP - 3099
EP - 3108
JO - IEEE transactions on industrial electronics
JF - IEEE transactions on industrial electronics
SN - 0278-0046
IS - 3
ER -