Yttrium-induced structural changes in sputtered Ti1-xAlxN thin films

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Authors

Translated title of the contribution	Yttrium-induced structural changes in sputtered Ti1-xAlxN thin films
Original language	English
Pages (from-to)	357-360
Journal	Scripta materialia
Volume	57
DOIs	https://doi.org/10.1016/j.scriptamat.2007.04.019
Publication status	Published - 2007