Three-dimensional atom probe investigations of Ti-Al-N thin films

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Translated title of the contribution	Three-dimensional atom probe investigations of Ti-Al-N thin films
Original language	English
Pages (from-to)	725-728
Journal	Scripta materialia
Volume	61
DOIs	https://doi.org/10.1016/j.scriptamat.2009.06.015
Publication status	Published - 2009