Thermally-induced stresses in thin aluminum layers grown on silicon
Research output: Contribution to journal › Article › Research › peer-review
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| Translated title of the contribution | Thermally-induced stresses in thin aluminum layers grown on silicon |
|---|---|
| Original language | English |
| Pages (from-to) | 74-76 |
| Journal | Powder diffraction |
| Publication status | Published - 2004 |
